Technical Benefits of this HENZE Boron Nitride Solution:
PVD, ARC and plasma parts and equipment made from HeBoSint®, HENZE´s sintered Boron Nitride
- possess
unsurpassed
resistance to thermal shock - provide
excellent
dielectric strength at high temperatures - contain no harmful elements that might evaporate
- can be easily cleaned by mild sand blasting
- have an extended life time
HENZE offers:
- a well-tried range of HeBoSint® Boron Nitride materials for all variants of PVD-ARC systems
- expert advice as to the use of HeBoSint® and HeBoCoat® in PVD and plasma systems
- high precision manufacturing of insulating PVD parts and equipment in our Kempten machining centre – exactly to your specifications and in any quantity ranging from prototypes to high volume requirements
- just-in-time delivery thanks to 100% in-house production and stock control
PVD-ARC-Systems need reliable Shielding from uncontrolled Electron Beams
Insulating PVD parts must possess high dielectric strength
In PVD systems a particular solid material – the so called target – is vaporised and then deposited by condensation onto a substrate. This can be achieved by several methodologies. In the ARC process the target is vaporised by means of a high energy voltaic arc. Since this electron beam is unguided, insulating shrouds and other shielding components are required to keep it on target and prevent equipment damage.
A further area that needs to be addressed with all PVD and plasma systems is unwanted metal deposition on the walls and on other equipments of the vacuum chamber.
HeBoSint® has become the industry standard in PVD and plasma technology equipment
PVD and ARC parts like insulating shrouds and strips made from HeBoSint®, HENZE´s sintered Boron Nitride, reliably constrain the voltaic arc within the necessary limits. This high temperature ceramic material is to be found in nearly all PVD-ARC units the world over.
Owing to its durability, which is superior to that of glass bonded mica, HeBoSint® is also becoming the material of choice for sub frames in PVD systems and PVD spare parts.
Download: Technical Information Boron Nitride vs. Glass Bonded Mica in PVD applications
Easy PVD cleaning: In all plasma and PVD systems unwanted metal deposits can be easily removed from surfaces which have been previously treated with HeBoCoat® liquids.
Find a technical solution
in the area of PVD or plasma
surface technology!
Please
contact us.
