Boron nitride in PVD systems
In physical vapor deposition (PVD) systems, insulators and the interior of the system must withstand extreme operating conditions, such as extreme electrical and thermal stresses. Boron nitride insulators stabilize the arc on the target and protect the system components from uncontrolled discharges.
During long coating cycles, boron nitride prevents stubborn deposits of coating materials from forming on insulation frames—such as rings and strips—as well as on internal components within the system. Nevertheless, regular mechanical cleaning, typically performed via abrasive sandblasting, cannot always be avoided. By selecting boron nitride with higher mechanical strength, material wear and micro-erosion can be reduced compared to conventional variants, thereby avoiding increased maintenance costs.
Typical applications:
- Shielding frames, strips, and rings
- Release agents for carousels and other peripheral equipment
Our Boron Nitride Recommendations
HeBoSint ® CL-N 200
HeBoSint ® SL-N 300
HeBoCoat ® SL-E 125
HeBoCoat ® PL-E 125
An Overview of the Benefits of HeBoSint® Shielding
- Consistent, stable arc guidance on the target
- Protecting plant equipment from ARC strikes
- Resistance of boron nitride shields to abrasive cleaning
- Lower maintenance and replacement part costs
- Reduction of process interruptions
- High temperature stability even during long cycles
- Optimierter Wirtschaftlichkeit pro Beschichtungszyklus
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Frequently Asked Questions
Why is boron nitride a proven material for PVD and plasma systems?
In PVD (physical vapor deposition) and plasma systems, the components are subject to extreme stresses. Boron nitride is the ideal material for this environment as it offers a perfect combination of extreme temperature resistance, excellent electrical insulation and a unique non-stick effect. As a result, it can withstand the harsh process conditions and constraints in plasma chambers permanently and safely.
Which specific boron nitride components are used in these systems?
Our solid HeBoSint® materials are the preferred choice for manufacturing components that are subjected to particularly high stresses. Typical components include shielding frames and strips for targets, covers, rails, protective tubes, as well as insulators and complete linings for plasma chambers. These sintered precision components offer high electrical breakdown strength under extreme heat and are particularly easy to clean due to the material’s specific separation behaviour.
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What are the economic benefits of boron nitride coatings in PVD processes?
Metal shielding frames and fixtures in PVD systems tend to become heavily contaminated during the coating process. To prevent this, they are treated with our liquid HeBoCoat® coatings (or plasma coatings), creating a highly effective non-stick and release layer. This makes subsequent cleaning of the frames much easier, reducing maintenance requirements and saving valuable process time.