Boron nitride in PVD systems
In physical vapor deposition (PVD) systems, insulators and the interior of the system must withstand extreme operating conditions, such as extreme electrical and thermal stresses. Boron nitride insulators stabilize the arc on the target and protect the system components from uncontrolled discharges.
During long coating cycles, boron nitride prevents stubborn deposits of coating materials from forming on insulation frames—such as rings and strips—as well as on internal components within the system. Nevertheless, regular mechanical cleaning, typically performed via abrasive sandblasting, cannot always be avoided. By selecting boron nitride with higher mechanical strength, material wear and micro-erosion can be reduced compared to conventional variants, thereby avoiding increased maintenance costs.
Typical applications:
- Shielding frames, strips, and rings
- Release agents for carousels and other peripheral equipment
Our Boron Nitride Recommendations
HeBoSint ® CL-N 200
Thanks to the optimal ratio of silicon-aluminum oxynitride to hexagonal boron nitride, the HeBoSint® CL-N 200 composite ceramic offers an excellent balance between improved wear resistance and, at the same time, excellent release properties due to its relatively high boron nitride content. This combination also results in outstanding electrical and thermal properties. Consequently, the material is recommended for many electrical insulation and casting applications, such as PVD shielding frames, as well as for nozzles and crucibles in metal casting.
Product Highlights
- Excellent release properties when used with metals
- Easy to clean
- Excellent electrical insulation properties
- Excellent thermal shock resistance
- Very good thermal conductivity
- low material weight
- Improved mechanical properties compared to pure boron nitride
HeBoSint ® SL-N 300
HeBoSint® SL-N 300 ceramic exhibits optimized wear resistance due to the addition of silicon-aluminum oxynitride. Components made from this material demonstrate their advantages precisely in applications where high mechanical stress and high wear resistance are critical.
Product Highlights
- Chemically and mechanically optimized wear behavior
- High compatibility with molten metals
- Maintaining the Purity of the Melt
- good release properties
- No wetting by most molten metals
- low material weight
HeBoCoat ® SL-E 125
HeBoCoat® SL-E 125* is a boron nitride spray in a handy aerosol can. Its ethanol-based formula ensures good wetting of the substrate and rapid drying. Inorganic binders ensure excellent adhesion to metal, glass, ceramics and graphite, particularly at high temperatures. The proportion of fine particles in the boron nitride powder gives the coating good release and lubricating properties.
Typical areas of application
- Release agents for sintering, welding and brazing applications; anti-spatter
- Release agents and lubricants in glass processing
- Protection of graphite components during silicification
- Coating of crucibles, nozzles and plugs in the foundry sector
- Anti-reflection spray for surface measurements at temperatures >200°C
Product highlights
- dries very quickly
- Excellent separating, lubricating and protective properties, even at high temperatures
- good surface adhesion
- High production output thanks to the extended service life of the plant
- clean welds and solder joints
- greater cleanliness compared with conventional release agents
- maximum effect with economical dosing
- effective protection against metal splashes
- dry lubricating film – no oils, greases or silicones
* HeBoCoat-Sprühlinie – Ethanol-BN-Gehalt ⋅10
HeBoCoat ® PL-E 125
HeBoCoat® PL-E 125* is an ethanol-based boron nitride coating containing an inorganic binder. The coating adheres very well even at high temperatures, both to metallic substrates and to glass, ceramics and graphite. Thanks to its ethanol-based formulation, the substrate surface is wetted exceptionally well, resulting in rapid drying. Furthermore, the use of pure boron nitride produces coatings with good anti-seize and lubricating properties, thereby reducing wear and contact reactions.
Typical areas of application
- Release agents for sintering, welding and brazing applications; anti-spatter
- Release agents and lubricants in glass processing
- Protection of graphite components during silicification
- Coating of crucibles, nozzles and plugs in the foundry sector
Product Highlights
- quick-drying
- Excellent separating, lubricating and protective properties, even at high temperatures
- good surface adhesion
- clean welds and solder joints
- High production output thanks to the extended service life of the plant
- greater cleanliness compared with conventional release agents
- dry lubricating film – no oils, greases or silicones
- maximum effect with economical dosing
- effective protection against metal splashes
* HeBoCoat Power Line – Ethanol BN-Content ⋅10
An Overview of the Benefits of HeBoSint® Shielding
- Consistent, stable arc guidance on the target
- Protecting plant equipment from ARC strikes
- Resistance of boron nitride shields to abrasive cleaning
- Lower maintenance and replacement part costs
- Reduction of process interruptions
- High temperature stability even during long cycles
- Optimierter Wirtschaftlichkeit pro Beschichtungszyklus
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Frequently Asked Questions
Why is boron nitride a proven material for PVD and plasma systems?
In PVD (physical vapor deposition) and plasma systems, the components are subject to extreme stresses. Boron nitride is the ideal material for this environment as it offers a perfect combination of extreme temperature resistance, excellent electrical insulation and a unique non-stick effect. As a result, it can withstand the harsh process conditions and constraints in plasma chambers permanently and safely.
Which specific boron nitride components are used in these systems?
Our solid HeBoSint® materials are the preferred choice for manufacturing components that are subjected to particularly high stresses. Typical components include shielding frames and strips for targets, covers, rails, protective tubes, as well as insulators and complete linings for plasma chambers. These sintered precision components offer high electrical breakdown strength under extreme heat and are particularly easy to clean due to the material’s specific separation behaviour.
What are the economic benefits of boron nitride coatings in PVD processes?
Metal shielding frames and fixtures in PVD systems tend to become heavily contaminated during the coating process. To prevent this, they are treated with our liquid HeBoCoat® coatings (or plasma coatings), creating a highly effective non-stick and release layer. This makes subsequent cleaning of the frames much easier, reducing maintenance requirements and saving valuable process time.